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Photolithography

CERTeM R&D platform

Photosensitive resin coating
  • Spin coater
  • Spray coater
  • Photosensitive dry film lamination
Exposition
  • UV insulator
  • Laser lithography
Resin development and cleaning
  • Automatic developpers
  • O2 plasma cleaning

CERTeM + platform

  • E-beam lithography