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Coating

CERTeM R&D platform

  • Pulsed laser deposition
  • Metal coating with lift-off
  • PVD sputtering: Physical Vapor Deposition - from ambient temperature to 700°C
  • PECVD: Plasma Enhanced Chemical Vapor Deposition
  • LT-PECVD: Low Temperature PECVD
  • LPCVD: Low Pressure Chemical Vapor Deposition SiN et SiPoly dopé