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Characterization

Characterization platform

PHYSICAL CHARACTERIZATION
  • X ray diffractometer
  • HALL effect sensor
  • Spectrometer FTIR - Fourier Transform InfraRed spectroscopy
  • Four probes measurement - resistivity testing
  • Granulometer
  • Laser Doppler vibrometer
ELECTRICAL CHARACTERIZATION
  • Probe station measurements I(V), C(V), impedancemetry, destructive tests CVS/LRVS (Linear Ramped Voltage Stress), RF 
  • ESD tester (ElectroStatic Discharge)
  • DLTS - Deep Level Transient Spectroscopy
  • Cryogenic probe station
  • Wafer probing bench
  • High voltage capacitance semiconductor analyzer 
  • TLP (Transmission Line Pulse) characterization system

CERTeM + platform

  • Platform of multi-channels tests on high frequency acoustics MEMS
  • Polarization and characterization platform of piezoelectric materials
  • Impedencemetry bench
  • Vibrometer laser UHF
  • Optical and acoustic characterization bench
  • Nanoscratch tester
  • Nanoindentation 
  • Confocal microscope
  • Digital holographic microscope

CERTeM R&D platform

  • Spectroscopic ellipsometer
  • Mechanical profilometer
  • Mass spectrometer
  • Digital microscope
  • Inspection microscope